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Super-resolution field emission scanning electron microscope CIQTEK SEM5000X (FE-SEM)
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Super-resolution field emission scanning electron microscope CIQTEK SEM5000X (FE-SEM)
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CIQTEK SEM5000X is a super-resolution field emission scanning electron microscope with an optimized electron optical column design that reduces total aberrations by 30% and achieves a super-resolution of 0.6 nm at 15 kV and 1.0 nm at 1 kV. Its high resolution and stability make it advantageous for advanced nanostructured material research and the development and production of high-tech semiconductor node chips.
Lens upgrade
The chromatic aberration of the objective has been reduced by 12%, the spherical aberration of the lens has been reduced by 20%, and the total aberration has been reduced by 30%.
Double-beam retardation technology
Beam retardation inside the lens, applicable to large-volume, cross-sectional and uneven surface samples. Dual deceleration technology (in-lens beam deceleration + tandem stage beam deceleration) challenges the limitations of sample surface signal acquisition scenarios.
Technical specifications:
Resolution: 0.6 nm at 15 kV, SE. 1.0 nm at 1 kV, SE
Acceleration Voltage: 0.02 kV ~ 30 kV
Magnification: 1 ~ 2,500,000 x
Electron Gun Type: Schottky Field Emission Electron Gun
Cameras: Dual Cameras (Optical Navigation + Camera Monitor)
Stage Type: 5-Axis Mechanical Eucentric Sample Stage
Stage Range: X=110 mm, Y=110 mm, Z=65 mm, T: -10*~+70°, R: 360°
Standard: Internal Detector, Everhart-Thornley Detector (ETD)
Operating System: Windows
Navigation: Optical Navigation, Quick Gesture Navigation, Trackball (Optional)
Automatic Functions: Automatic Brightness and Contrast, Auto Focus, Automatic Stigmator