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High-speed scanning electron microscope CIQTEK HEM6000 (SEM)
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High-speed scanning electron microscope CIQTEK HEM6000 (SEM)
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High-speed scanning electron microscope for large-volume cross-sectional imaging
CIQTEK HEM6000 is equipped with technologies such as high-current, high-brightness electron gun, high-speed electron beam deflection system, high-voltage sample stage retardation, dynamic optical axis, and immersion electromagnetic and electrostatic combined objective to achieve high-speed imaging while providing nano-resolution.
The automated workflow is designed for applications such as a more efficient and intelligent workflow for large-area high-resolution imaging. The imaging speed can be more than 5 times faster than a conventional field emission scanning electron microscope (FE-SEM).
Functions:
High-speed scanning driver
10ns/pixel dwell time, maximum imaging speed of 2*100M pixels/s
Electronic signal filtering system
SE/BSE switching without signal, mixing with adjustable ratio
Fully electrostatic high-speed beam deflection system
Large field imaging with high resolution, maximum field of view up to 64μm*64μm at 4nm per pixel
Slow-down technology
Reduce the landing voltage of incident electrons, increasing the electron capture efficiency of signal
Electromagnetic and electrostatic combined beam deflection system of immersion objective
The magnetic field of the objective immerses the sample, which is conducive to low-aberration, high-resolution imaging